Mini-Max™ EFEM
Nidec Genmark’s MiniMax™ EFEM is a Class 1 minienvironment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation.
Products
Integrated Solutions
Achieve exceptional performance with Nidec Genmark's highest-throughput mini environment and wafer sorter systems, and benefit from next-generation, customized solutions offered by our EFEM and stocker lines.
SortMax+ Sorter
The SortMax+ Sorter is a new-generation wafer sorter that delivers the highest throughput, while utilizing clean technology, rapid software setup and the lowest cost of ownership.
CODEX Substrate Stocker
The Nidec Genmark CODEX Substrate Stocker is designed to be used as standalone equipment that handles and stores 150 mm, 200mm and 300mm substrates.
