Integrated Solutions

EFEM Inquiry Form

Please fill out the form below in as much detail as possible, so we can accurately assess your specification needs and generate a quote.

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Nidec Genmark Integrated Solutions Product Line

Standards Compliance

- SEMI S1-0701 – Safety Guidelines for Equipment Safety Labels
- SEMI S2-1102 – Environmental, Safety, and Health Guideline for Semiconductor Manufacturing Equipment
- SEMI S7-96 – Safety Guidelines for Environmental, Safety, and
Health (EHS) Evaluation of Semiconductor Manufacturing Equipment
- SEMI S8-0701 – Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment
- SEMI S9-1101 – Safety Guidelines for Electrical Design Verification
Tests for Semiconductor Manufacturing Equipment
- SEMI S10-1296 – Safety Guidelines for Risk Assessment
- SEMI S13- 0298 – Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment
- SEMI E15-0698 – Specification for Tool Load Port
- SEMI E54-0997 – Sensor/Actuator Network Standard
- SEMI E57-0600 – Mechanical Specification for Kinematic Couplings
Used to Align and Support 300mm Wafer Carriers
- SEMI E58-0301 – Automated Reliability, Availability, and Maintenability Standards (ARAMS): Concepts, Behavior and Services
- SEMI F47-0400 – Specification for voltage sag immunity
- SEMI S11-1296 – Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments

Please fill out the form below:
Typical EFEM Layout
1
General Information
2
EFEM Configuration
3
EFEM Configuration
4
Robot / Load Port
5
Custom Requirements
0%
(per hour)
⁰C
⁰C
(from floor)
Standard: PTFE ULPA 99.99995% @ 0.1 micrometer efficiency
Standard: Dynamic control, 0.01” +/- 0.005” w.c.
Standard: Ergotron Arm PN 45-029 gray; Ergotron Keyboard Tray PN 77-049 gray; Keyboard and Mouse; Monitor – two options: touch screen/no touch screen
Standard: CORE 3.2G 12M 1151P 6CORE I7-8700; 8G DDR4-2666 1GbX8 1.2V SAM; 2 x 500G 3.5" SATA 7KRPM; Windows 10 IoT Enterprise
Standard: Patlite PN SEFB – 302D SZ-017, mounted on the front panel. Colors top to bottom – red, yellow, green
Standard: IPS Clamping Shoe PN 21-021
Standard: McMaster PN 6785K74
Standard: Cognex In-Sight 1700
Standard: Southco PN 6243351-3, tool lockable
Standard: Schmersall PN BNS 333-01YD and BPS 300 on the side robot access doors. Lower doors cannot be opened without opening top ones first.
Standard: 115/120VAC @ 60Hz, 10A ± 10%; 220/240VAC @ 50Hz, 10A ± 10%
Standard: Front breakout panel for UI, rear breakout panel for power/facilities supply
See layout drawing at top of page
Robot Configuration
Load Port Configuration
Load Port #1
Load Port #2
Load Port #3
Load Port #4
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(Max 10 MB)
Please include any additional custom requirements and comments in this section
Please attach any drawing files or other specification related documents that you would like us to consider
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