Nidec Genmark EFEM Quote Inquiry

EFEM Inquiry Form

Please fill out the form below in as much detail as possible, so we can accurately assess your specification needs and generate a quote.

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Nidec Genmark Integrated Solutions Product Line

Standards Compliance

- SEMI S1-0701 – Safety Guidelines for Equipment Safety Labels
- SEMI S2-1102 – Environmental, Safety, and Health Guideline for Semiconductor Manufacturing Equipment
- SEMI S7-96 – Safety Guidelines for Environmental, Safety, and
Health (EHS) Evaluation of Semiconductor Manufacturing Equipment
- SEMI S8-0701 – Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment
- SEMI S9-1101 – Safety Guidelines for Electrical Design Verification
Tests for Semiconductor Manufacturing Equipment
- SEMI S10-1296 – Safety Guidelines for Risk Assessment
- SEMI S13- 0298 – Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment
- SEMI E15-0698 – Specification for Tool Load Port
- SEMI E54-0997 – Sensor/Actuator Network Standard
- SEMI E57-0600 – Mechanical Specification for Kinematic Couplings
Used to Align and Support 300mm Wafer Carriers
- SEMI E58-0301 – Automated Reliability, Availability, and Maintenability Standards (ARAMS): Concepts, Behavior and Services
- SEMI F47-0400 – Specification for voltage sag immunity
- SEMI S11-1296 – Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments

Please fill out the form below:

            1
          
              General Information
              
            2
          
              EFEM Configuration
              
            3
          
              EFEM Configuration
              
            4
          
              Robot / Load Port
              
            5
          
              Custom Requirements

Company

Full Name

Phone Number

Manipulated Object

Select an Option

Handling Requirements

Select an Option

Cleanliness Requirements

Select an Option

Process Application

Select an Option

Throughput

(per hour)

Process Temperature

⁰C

Substrate Temperature

⁰C

Handling Plane

(from floor)

Frame

Select an Option

Mounting

Select an Option

Fan Filter Unit

Standard: PTFE ULPA 99.99995% @ 0.1 micrometer efficiency

Select an Option

Differential Pressure

Standard: Dynamic control, 0.01” +/- 0.005” w.c.

Select an Option

User Interface Set

Standard: Ergotron Arm PN 45-029 gray; Ergotron Keyboard Tray PN 77-049 gray; Keyboard and Mouse; Monitor – two options: touch screen/no touch screen

Select an Option

User Interface Location

Select an Option

Temperature Control

Select an Option

Humidity Control

Select an Option

Ionizer

Select an Option

Host PC

Standard: CORE 3.2G 12M 1151P 6CORE I7-8700; 8G DDR4-2666 1GbX8 1.2V SAM; 2 x 500G 3.5" SATA 7KRPM; Windows 10 IoT Enterprise

Select an Option

Beacon Lights

Standard: Patlite PN SEFB – 302D SZ-017, mounted on the front panel. Colors top to bottom – red, yellow, green

Select an Option

Earthquake Protection

Standard: IPS Clamping Shoe PN 21-021

Select an Option

EMO

Standard: McMaster PN 6785K74

Select an Option

EMO Location

Select an Option

Wafer ID Reader

Standard: Cognex In-Sight 1700

Select an Option

Latches

Standard: Southco PN 6243351-3, tool lockable

Select an Option

Door Interlocks

Standard: Schmersall PN BNS 333-01YD and BPS 300 on the side robot access doors. Lower doors cannot be opened without opening top ones first.

Select an Option

Power Requirements

Standard: 115/120VAC @ 60Hz, 10A ± 10%; 220/240VAC @ 50Hz, 10A ± 10%

Select an Option

Interior Lighting

Select an Option

Breakout Panels

Standard: Front breakout panel for UI, rear breakout panel for power/facilities supply

Select an Option

Material Buffer Station

Select an Option

Tool Attachment Plate

Select an Option

Wafer Mapping

Select an Option

Carrier Protection

Select an Option

Facilities Location

Select an Option

Service Access

Select an Option

EFEM Finish

Select an Option

System Reach Requirement

Rear Panel Requirement

See layout drawing at top of page

Robot Configuration

Robot Type

Select an Option

Robot Mount

Select an Option

Lower End Effector

Select an Option

Upper End Effector

Select an Option

Robot Vertical Travel

Select an Option

Payload

Select an Option

Substrate Aligner

Select an Option

Aligner Location

Select an Option

Load Port Configuration

Load Port #1

Type

Select an Option

E84 Option

Select an Option

Carrier ID

Select an Option

Carrier Type

Select an Option

Load Port #2

Type

Select an Option

E84 Option

Select an Option

Carrier ID

Select an Option

Carrier Type

Select an Option

Load Port #3

Type

Select an Option

E84 Option

Select an Option

Carrier ID

Select an Option

Carrier Type

Select an Option

Load Port #4

Type

Select an Option

E84 Option

Select an Option

Carrier ID

Select an Option

Carrier Type

Select an Option

Would you like to add the GIFT Server software suite to your quote?

Yes

To add the GIFT Server software suite to your quote, please complete the following fields:

List each process module and its function:

Who will control the process modules?

Client

GIFT Server

If GIFT Server is to control the process modules, please provide the complete documentation of the module interface

No Choosen File

(Max 10 MB)

Will you utilize your own user interface or embed your user interface in GIFT?

Please provide the full flow of your process and all scenarios from start to finish (i.e., from the moment wafers are taken out of the cassette to when they are back in the cassette, including all exceptional conditions):

Custom Requirements

Please include any additional custom requirements and comments in this section

Drawing or Specification Upload

Please attach any drawing files or other specification related documents that you would like us to consider

No Choosen File

(Max 10 MB)

Integrated Solutions

Tool Automation

Software Solutions

Engineering Services

Contract Manufacturing

Motion Control

Man Machine Interface

EFEM Inquiry Form

Standards Compliance

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