- Integrated controls and monitoring system
- Fan-filter unit with VFD controlled impeller and PTFE media filter.
- Integral lighting
- CFD model available upon request
Nidec Genmark’s MiniMax™ Equipment Front End Module (EFEM) is a class 1 minienvironment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation.
The MiniMax™ can be customized to meet the automation requirements of any semiconductor manufacturing tool application. It can be specified with one of Nidec Genmark’s sophisticated and precise wafer and reticle handling robots, including the full line of patented GPR single or dual arm robots, GREX robot series, single and dual wafer aligners, FOUP/FOSB openers, reticle libraries, as well as any other customer specified equipment.
Nidec Genmark’s ECS300 Automation Software Suite is the standard product controlling the MiniMax™ system and the interface with the manufacturing equipment and the fab.
- Automatic pressure control system adjusts fan speed to maintain pressure set-points through changes in surrounding pressure
- Installation, certification, and balance to SEMI E-44-96
- SEMI S2-93A, S6-93 compliant
| ENCLOSURE | |
|---|---|
| Base Frame | Welded steel, BOLTS compatible load ports |
| Coating | Baked powder coat |
| FAN FILTER UNIT | |
| FFU | Per customer specification |
| Filter Media | PTFE ULPA 99.99995% @ 0.1 micro meters efficiency |
| Automation | |
| Atmospheric Robot (types) | G-Rex; GB4S; GPR-GB7S; GPR-GB8; GPR-GB8-SM |
| End Effector (types) | Vacuum gripping, Edge gripping, Gravity |
| Prealigner (types) | Vacuum gripping chuck; edge rgipping chuck |
| Wafer Mapping | Through-beam |
| Wafer Size | 300mm |
| User Interface | Keyboard, mouse, touch screen |
| Software Interface | SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116 |
| Communications | RS232 (SECS-1), Ethernet (HSMS) |
| Physical Properties | |
| Length | Two load ports - 45" Three load ports - 66" Four load ports - 80" |
| Air Pressure: Relative to Cleanroom Ambient | |
| Port Closed | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa) |
| Load/Unload | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13 Pa) |
| ME Recovery Time | < 38 sec |
| Airflow Velocity | 90 +/- 10% ft/min, (0.45 +/- 10% m/sec) |
| Standards to Verify Compliance | |
| SEMI | - SEMI S1-0701 - SEMI S2-1102 - SEMI S7-96 - SEMI S8-0701 - SEMI S9-1101 - SEMI S10-1296 - SEMI S13- 0298 - SEMI E15-0698 - SEMI E44-96 - SEMI E54-0997 - SEMI E57-0600 - SEMI E58-0301 - SEMI F47-0400 |
| Other Standards | CE Standards, International Sematech Integrated Minienvironment Best Design Practice |
| Environment | |
| Cleanliness | Class 1 |
