- Stores silicon or glass 150 mm, 200mm and 300 mm diameter wafers
- Provides sorting capabilities
- Semi-automated teaching
- Carrier ID (RF and barcode) reading
- Capable of handling warped wafers
- Remote connectivity and diagnostics
The Nidec Genmark CODEX Substrate Stocker is designed to be used as standalone equipment that handles and stores 150 mm, 200mm and 300mm substrates. The system consists of a set of tightly coupled hierarchical intelligent subsystems performing specific functions that are supervised by a main computer running the GIFT platform. In addition to database management, carrier import, measurement, storage, carrier export, recipe creation and editing, GIFT provides functions such as carrier mapping and aligning. To assure reliable safe operation, all subsystems have been individually certified to relevant industry performance and safety standards. A safety monitoring protocol has also been incorporated into the control structure assuring that each atomic procedure is confirmed before the next command is issued.
- Integrated metrology capabilities (optional)
- Reduced weight and improved stiffness
- Fast, linear-motor-based material handling system
- Interfaces to various third party motion controllers (B&R, Bosch Rexroth)
- Multi-axis software control
- Extended capacity substrate storage with indexing capabilities (carousels)
- Flipping Station
- FFU with horizontal laminar flow
- Full adoption of Nidec Genmark’s Linux-based kernel
| SUBSTRATES | |
|---|---|
| Substrate Size | 150 mm, 200mm and 300 mm |
| Substrate Type | Silicon or glass wafers |
| CAPACITY | |
| 6 Carousel Configuration | - 150 mm wafers – 12,096 wafers - 200 mm wafers – 9,072 wafers - 300 mm wafers – 4,536 wafers |
| 7 Carousel Configuration | - 150 mm wafers – 14,112 wafers - 200 mm wafers – 10,584 wafers - 300 mm wafers – 5,292 wafers |
| Performance | |
| Throughput | - Output rate > 250 wafers per hour - Input rate > 80 wafers per hour - 160 wafers/hour with min. 80 wafers hour (160 wafers out, 80 wafers in) |
| Reliability | - MTBFGS =15,370 hours - MCBF 2 = 459; 200 hours - Uptime: 95% |
| Standards to Verify Compliance | |
| SEMI | - SEMI S1-0701 - SEMI S2-1102 - SEMI S7-96 - SEMI S8-0701 - SEMI S9-1101 - SEMI S10-1296 - SEMI S13- 0298 - SEMI E15-0698 - SEMI E44-96 - SEMI E54-0997 - SEMI E57-0600 - SEMI E58-0301 - SEMI F47-0400 |
| Other Standards | CE Standards, International Sematech Integrated Minienvironment Best Design Practice |
| ENVIRONMENT | |
| Cleanliness | Class 1 |
| Particle Contamination | <= 0.0016 adders per cm² per wafer pass, i.e. not more than 5 adders after 10 cycles of one 200mm diameter wafer, for particles of over 0.2 µm size |
| Altitude | Up to 1000m above sea level |
| Ambient Air Temperature | +5° to +40° C |
