Products
Motion Control
Nidec Genmark's Engineering Services team specializes in delivering custom motion control solutions that help you gain the advantage your business needs. Benefit from our 30-plus years of expertise in the design, development, and manufacture of wafer handling equipment from inception to delivery. We are here to imagine and realize the bespoke solutions your unique manufacturing process requires.
State of the Art Motion Control Features
- Control of versatile robotic structures, including "yaw", "pitch" and "roll" motion capabilities
- S-curve velocity profiling, based on polynomial splines and Bernstein-Bezier curves
- Continuous path control in multi-segment smooth trajectories
- Synchronization of multiple axes
- Trajectory control with user defined velocity profiles
- Kinematical modeling of open and closed loop mechanisms
- Singularity consistent path planning and singularity avoidance
- Optimal PID filter tuning
- Automatic adjustment with respect to the surrounding equipment (cassettes, process stations, etc.)
Benefit from Our Expertise
- Tilting capabilities in terms of the end effector frame
- Compensation for deflection of the end effector, the manipulated object and geometric inaccuracies of the arm's scanning and aligning features
- Wafer mapping based on through-beam or reflective sensors
- Automatic detection of the planarity and the center of wafers and FPDs
- Non contact FPD aligning and misalignment compensation on-the-fly
- Programmable travel limits
- Position tracking error detection
- Amplifier overload protection
- Emergency stop
