Nidec Genmark offers innovative wafer handling systems, advanced load ports and substrate alignment systems that are a standard for reliability and performance.
Nidec Genmark’s G-Rex™ robotic series addresses all current technical specifications for standard payload 300mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.
Nidec Genmark’s G-Rex™ robotic series addresses all current technical specifications for standard payload 300mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.
The GPR-GB7SY Yaw-Axis (single and dual) robot features Nidec Genmark's patented GPR and YAW technologies to achieve the highest level of performance currently available in an automated material handler for up to 300mm wafer payloads with utmost reliability and precision.
The EVTMHS is a wafer handling system with extended vertical travel, designed to transport 300mm wafers in semiconductor manufacturing tools that require large work envelope solutions.
The GB4P Robot System with an integral wafer prealigner is the most compact robot and prealigner package available on the market today for wafer handling applications up to 200mm, standard payload and throughput.
Nidec Genmark’s GB4S robot system is a compact, high performance substrate handler for 300mm wafers.
Nidec Genmark's GB4S-CTR Wafer Carrier Transport Robot is designed to transport carriers for wafer sizes up to 300mm quickly and accurately between user defined stations.
Designed for ultra-precise transport of 300mm wafers and large FPDs, the GPR-GB8Y Robot System combines increased reach and load capacity while employing Nidec Genmark’s breakthrough patented GPR™ technology.
Designed for ultra-precise transport of 300mm wafers and large FPDs, the GPR-GB8 Robot System combines increased reach and load capacity while employing Nidec Genmark’s breakthrough patented GPR™ technology.
The AVR Vacuum Robot family provides highly precise and reliable material handling in ultra-clean, high-vacuum processing environments.
The AVR SMV 3000 is a high-performance dual-arm vacuum robot that provides precise, reliable and repeatable wafer transportation in vacuum processing capital equipment down to 10E-10 Torr.
The GPR GB9 Vacuum Robot System is a part of Nidec Genmark’s GPR™ line of precision transport robotics and is available with vertical stroke options of 3" and 6".
The GPR SMV Vacuum Robot System is a high-performance dual-arm vacuum robot employing Nidec Genmark's breakthrough patented GPR™ technology.
The GPR™ Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment.
The Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment, where material handling is performed by robots with limited vertical motion capabilities.
Nidec Genmark's Porta FOSB ™ is versatile load port specifically designed for 300mm Front Opening Storage Boxes (FOSB)
Nidec Genmark's Porta R5 and R6™ are BOLTS compatible load ports specifically designed for automated reticle loading
Nidec Genmark’s Open Cassette Adapter (OCA) is an optional component for our load ports that allows older technology open wafer cassettes to be used on newer tools
Nidec Genmark’s Porta300™ plus is an advanced load port for 300mm wafer carriers
The Edge Grip Prealigner is an autonomous device providing accurate and efficient wafer alignment and exceptional performance when combined with Nidec Genmark's Edge Grip end effectors.
The Remote Prealigner (RPA) is an intelligent robot add-on, providing accurate and non-contact measurement of the eccentricity and the orientation of substrate placement.
The Standalone Prealigner is an autonomous device, which provides accurate, non-contact measurement of the eccentricity and orientation of substrate placement.
The remote vaccum prealigner is engineered for use with all Nidec Genmark vacuum robots, providing accurate, non-contact measurement of the eccentricity and orientation of substrate placement in vacuum environments.
A remote measurement unit comprising of three CCDs, designed to work with flat panel handling robots to determine panel position and orientation.
