- Accurate repeatable transport of all SEMI compatible 150mm, 200mm and 300mm cassettes
- Compact footprint
- Stocker compatible
Nidec Genmark’s GB4S-CTR Wafer Carrier Transport Robot is designed to transport carriers for wafer sizes up to 300mm quickly and accurately between user defined stations. Applications include stocker bay loading and unloading, as well as intra-bay cassette transport between tool load ports and process chambers. The GB4S-CTR’s compact size allows easy integration in semiconductor manufacturing tool designs without impacting tool footprint.
The robot’s structurally reinforced 2-link arm maintains the compact footprint while providing the payload capacity required for fast, smooth and repeatable transportation of fully loaded carriers.
- Can handle payloads up to 33lbs
- Two link heavy duty arm
- End effector options can be customized to allow for flexible cassette handling
| Configuration | |
|---|---|
| Carrier Type | up to 300mm wafer cassettes |
| Arm Configurations | 2 link: 5.20"-5.20"; |
| End Effector | Gravity |
| Wafer Mapping | Optional; reflective, through-beam, retro reflective (requires installation of reflective tape behind wafer carriers) |
| Physical Properties | |
| Size (body diameter) | 9.76" |
| Body Height | 9.3" |
| Axes | 2 - T, R |
| Range of Motion | T: 500° R: [-10.2", 10.4"] |
| Performance | |
| Payload (Dynamic/Static) | 33lbs |
| Repeatability | T: +/- 0.01° R: +/- 0.001" |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer Contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2 - 93A |
| Standards to Verify Compliance | EN 60204-1 EN 292-1 EN 292-2 |
| Reliability per SEMI E10 | >6M |
