- Fast, accurate, repeatable wafer and photomask transport
- Extended reach and vertical travel combined in a compact package
- Extended rotation motion range
Nidec Genmark’s GB4S robot system is a compact, high-performance substrate handler for 300mm wafers. It features a direct-drive swapping mechanism with minimized height, and a maximized ratio between the effective vertical stroke and the robot height.
The GB4S is designed for wafer handling within vertical profile (minimized vertical size) processing tools. It is an excellent automation choice for multi-layer processing tools with stacked process modules.
When used in conjunction with the Nidec Genmark Remote Prealigner, the GB4S Robot System, provides a highly accurate, highly repeatable alignment and transport system for wafers and reticles. It excels at handling “thin wafers”, through specially designed end effector paddles and aligner chucks and lifting pins. This, along with dedicated motion control software, ensures reliable material handling while overcoming increased wafer sag and fragility. A flipping end effector is also available as an option.
- Optional scanning feature with fast and slow scanning modes
- Proprietary multi-segment continuous path motion control
- DSP-based motion controller for vibration-free wafer transport
| Configuration | |
|---|---|
| Substrate Size | 300mm |
| Arm Configurations | 2 Link: 5.25"-5.25" 2 Link: 7.25"-7.25" 3 Link: 4"-8"-4" |
| Degrees of freedom ( number of axes) | 3 |
| Axes | T, R, Z |
| End Effector | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | Reflective, through-beam, laser scanner, retro reflective (requires installation of reflective tape behind wafer carriers) |
| Physical Properties | |
| Body diameter | 9.76" |
| Minimum robot height (at the lowest Z-axis position) | 300mm |
| Maximum robot height
(at the highest Z-axis position) | 800mm |
| Range of Motion | T: 290 degrees R: 449 mm Z: 500 mm |
| Performance | |
| Payload | 2.2 lbs. |
| Repeatability (3σ) | T: +/- 0.01° R: +/- 0.003937" Z: +/- 0.003937" |
| Environment | |
| Cleanliness | ISO Class 1 compatible |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2 - 93A |
| Standards to Verify Compliance | EN 60204-1 EN 292-1 EN 292-2 |
| Reliability per SEMI E10 | MCBF >15M MTBF >100000 h |
