- Fast, accurate, repeatable wafer and photomask transport
- Extended reach and vertical travel combined in a compact package
- Extended rotation motion range
Nidec Genmark’s GB4S robot system is a compact, high performance substrate handler for 300 mm wafers. It features a direct-drive swapping mechanism with minimized height, and a maximized ratio between the effective vertical stroke and the robot-height.
The GB4S is designed for wafer handling within vertical profile (minimized vertical size) processing tools. It is an excellent automation choice for multi-layer processing tools with stacked process modules.
- Optional scanning feature with fast and slow scanning modes
- Proprietary multi-segment continuous path motion control
- DSP-based motion controller for vibration-free wafer transport
| Configuration | |
|---|---|
| Substrate Size | 300mm |
| Arm Configurations | 2 Link: 5.25"-5.25" 2 Link: 7.25"-7.25" 3 Link: 4"-8"-4" |
| Degrees of freedom ( number of axes) | 3 |
| Axes | T, R, Z |
| End Effector | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | Reflective, through-beam, laser scanner, retro reflective (requires installation of reflective tape behind wafer carriers) |
| Physical Properties | |
| Body diameter | 9.76" |
| Minimum robot height (at the lowest Z-axis position) | 300mm |
| Maximum robot height
(at the highest Z-axis position) | 800mm |
| Range of Motion | T: 290 degrees R: 449 mm Z: 500 mm |
| Performance | |
| Payload | 2.2 lbs |
| Repeatability (3σ) | T: +/- 0.01° R: +/- 0.003937" Z: +/- 0.003937" |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2 - 93A |
| Standards to Verify Compliance | EN 60204-1 EN 292-1 EN 292-2 |
| Reliability per SEMI E10 | MCBF >15M MTBF >100000 h |
