G-Rex4™ Dual Arm Robot System
Quote Inquiry
- Low particle generation and higher yields
- Increased reliability due to fewer moving parts
- Optimal throughput and repeatability
- Modular design reduces service cycle times
- Simplified maintenance and service
- Can be mounted on a horizontal track (G-Rex4™ HT)
Nidec Genmark’s newest robotic series, the G-Rex4™ addresses all current technical specifications for standard payload 300mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.
The G-Rex4™ robotic system offers dual-arm capability in a small footprint, optimal throughput, reliability and serviceability in a cost effective package. It features innovative patent-pending designs, advanced control approaches and EZTeach technologies, resulting in improved performance and reliability. Because of its simplified designs the G-Rex4™ is a low-mass product with fewer parts and moving components. The result is improved dynamics leading to higher acceleration and speed.
The G-Rex4™ is easy to install, teach, program and troubleshoot. Due to its versatility, the G-Rex4™ supports diverse tool applications and flexible customizable configurations, including single and dual arm, single and dual blade end effectors, and vacuum or edge hold support. Also available in a horizontal-track mounted configuration as the G-Rex4™ HT, featuring an additional GX axis for an extended range of motion in large work envelopes.
- Low body weight for higher acceleration and yields
- Extended reach and vertical travel combination
- Extended rotation motion range
- DSP-based motion controller for vibration-free wafer transport
- Advanced motion planning and blending
- Optimal PID timing and gains scheduling
- Optional fast scanning feature
| Configuration | |
|---|---|
| Substrate Size | up to 300mm |
| Arm Configurations | 6.45"-6.45", 8.68"-8.68" |
| End Effector | Vacuum, Edge Gripping, Bernoulli |
| Wafer Mapping | Laser scanner |
| Physical Properties | |
| Size (body diameter) | 9.8" |
| Vertical Stroke / Body Height | 20" / 26.60" 12" / 18.60" 2" / 13.60" |
| Axes | 5: T, R, R2, Z, GX (optional, for track-mounted configuration) |
| Range of Motion | T : 700° R, R2: - 6.45", 6.45": [-8.0", 12.3"] - 8.68", 8.68": [-12.0", 16.5"] Z: 2", 6", 12", 16", 20" GX: up to 60.5" (with 4 load ports) |
| Performance | |
| Payload | 2 lbs |
| Repeatability | T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer Contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC 89/336/EEC (EMC) SEMI S2-93A SEMI S8-95 |
| Standards to Verify Compliance | EN 55011 EN 50082-1 EN 60204-1 |
| Reliability per SEMI E10 | >15M MCBF |
