- Bridge to Class 1 Isolation
- Use open-cassette technology on newer tools
- Seamless plug-and-play integration with the Porta 300 plus
Nidec Genmark’s Open Cassette Adapter (OCA) is an option for our load port tools that allows older technology open wafer cassettes on newer tools. The OCA creates an ability to bridge to Class 1 isolation, which most current tools are optimized for. This enables end users that still use open-cassette technology to take advantage of newer technology without the financial hardship of a facility upgrade.
- Accepts and identifies 150mm, 200mm and 300mm open cassettes
- Wafer carrier presence sensors
- Protrusion sensors to detect protruding substrates
- Manually operated shielding cover for loading and unloading of open cassettes
| Configuration | |
|---|---|
| Compatibility | BOLTS compatible |
| Carrier Types | 150mm, 200mm and 300mm open cassettes |
| Carrier Sensors | Carrier Placement Sensors |
| Physical Properties | |
| Clamping Mechnism | Kinematic coupling pins on Porta 300 plus loading platform |
| Height | - 1385mm (54.54 inches) With cart - 1336mm (52.61 inches) Without cart |
| Width | 470mm (18.50 inches) |
| Actuation | Manually operated shielding cover |
| Environment | |
| Cleanliness | Class 1 ANSI, when in class 100 environment |
