- BOLTS compatible mechanical interface
- Outstanding performance based on servo controlled mechanisms
- Minimal particle, vibration and noise generation
- Modular design, easy maintenance access
Nidec Genmark Automation’s Porta FOSB™ is versatile load port specifically designed for 300mm Front Opening Storage Boxes (FOSB). The device has a tilting platform allowing for secure manual transfer and opening of the 300mm carriers. The Porta FOSB™ is isolated by servo actuated enclosure providing safe access to the wafers and clean front-end mini-environments.
The versatility of the design can accommodate 150mm or 200mm open cassettes. Dedicated carrier presence sensors indicate the size of the loaded carrier. Controlled by onboard computer and controller, the equipment and operator is safeguarded by several hardware and software safety interlocks. Designed in accordance with all applicable SEMI standards and I300I guidelines, the Porta FOSB raises the benchmark in performance, reliability, functionality for the equipment in this category.
- Compatible Carriers - 300mm FOSB, 200mm, 150mm Open Cassettes
- Carrier Presence Sensors for each wafer size
- Access OK Indicator
- Fast load/unload times - <30 sec.
| Configuration | |
|---|---|
| Compatibility | BOLTS compatible |
| Carrier Types | - FOUP, 25 wafers - 25 wafers, 150mm and 200mm cassettes, when using open cassette adaptor |
| Substrate Size | 150mm, 200mm, 300mm |
| Substrate Type | Wafer |
| Status Indicators | 2 lights - "Placement" and "Action OK" |
| Carrier Sensors | - FOUP placement - 150mm carrier placement - 200mm carrier placement |
| Physical Properties | |
| Height | 1336mm (52.60 inches) |
| Width | 470mm (18.50 inches) |
| Actuation | - Pneumatic (tilting motion of the loading plate) - Servo motor driven top and side covers |
| Performance | |
| Reliability | MCBlp > 150K cycles MCBl > 321.877 cycles MTTR 60 minutes Availability 99.89% |
| Speed | Load: 30 seconds Unload: 30 seconds |
| Environment | |
| Cleanliness | Class 1 ANSI, when in class 100 environment |
| Standards Compliance | |
| SEMI | - E15.1: Load Port - S2 Compliance - S8 Ergonomics guideline compliance - E44 Guide for Procurement and Acceptance of Minienvironments - E57 Mech. Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers - E10 Availability |
| Other Standards | - Seismic Stability for UBC Zone 4 area and S2 - EU Machinery Directive - EU Low voltage dir. - EU EMI/ESD - Carrier ID Reader per I300I Factory guideline |
| RELIABILITY PER SEMI E10 | |
| MCBF (Cycles) | > 1M |
