- Handles 125mm (R5) or 150mm (R6) reticles
- BOLTS compatible mechanical interface
- Minimal particle, vibration and noise generation
- Modular design, easy maintenance access
- Electromagnetic door lock
Nidec Genmark Automation’s Porta R5™ and Porta R6™ are BOLTS compatible load ports, specifically designed for automated reticle loading. They feature a transparent enclosure accommodating up to 6 individual containers for 125mm (R5) or 150mm (R6) reticles. The enclosure has scanning sensors indicating the proper placement of each container and the reticle presence inside of it. The Porta R Series load ports have an electromagnetic door lock, a servo-actuated reticle box opener and an isolation door providing fully automated and safe reticle access.
- Compatible carriers - 125mm reticle boxes
- Box placement and reticle presence sensors for each slot
- Access OK indicator
- Door closed and carrier presence indicators
- Two manual access buttons (optional)
- Kinematic coupling for accurate mounting (optional)
| Configuration | Porta R5 | Porta R6 |
|---|---|---|
| Compatibility | BOLTS compatible | BOLTS compatible |
| Carrier Type | Six 125mm reticle carriers | Six 150mm reticle carriers |
| Substrate Size | 125mm reticles | 150mm reticles |
| Substrate Type | Reticle | Reticle |
| Status Indicator | 2 lights - "Placement" and "Action OK" | 2 lights - "Placement" and "Action OK" |
| Operator Push Buttons | One Manual Access button | One Manual Access button |
| Substrate Mapping | Reticle presence sensors | Reticle presence sensors |
| Carrier Sensors | Carrier Placement Sensors | Carrier Placement Sensors |
| Physical Properties | ||
| Clamping Mechanisms | Lockable interlock of the carriers loading door | Lockable interlock of the carriers loading door |
| Height | - 1385mm (54.54 inches) With cart - 1336mm (52.61 inches) Without cart | - 1385mm (54.54 inches) With cart - 1336mm (52.61 inches) Without cart |
| Width | 470mm (18.50 inches) | 470mm (18.50 inches) |
| Actuation | - Servo motor driven carriers opening mechanism - Servo motor driven door opening mechanism | - Servo motor driven carriers opening mechanism - Servo motor driven door opening mechanism |
| Performance | ||
| Reliability | MCBlp > 150K cycles MCBl > 321.877 cycles MTTR 60 minutes Availability 99.89% | MCBlp > 150K cycles MCBl > 321.877 cycles MTTR 60 minutes Availability 99.89% |
| Speed | Load: 5.5 seconds Unload: 3 seconds | Load: 5.5 seconds Unload: 3 seconds |
| Environment | ||
| Cleanliness | Class 1 ANSI, when in class 100 environment | Class 1 ANSI, when in class 100 environment |
| Standards compliance | ||
| SEMI | - E15.1: Load Port - S2 Compliance - S8 Ergonomics guideline compliance - E44 Guide for Procurement and Acceptance of Minienvironments - E10 Availability | - E15.1: Load Port - S2 Compliance - S8 Ergonomics guideline compliance - E44 Guide for Procurement and Acceptance of Minienvironments - E10 Availability |
| Other Standards | - Seismic Stability for UBC Zone 4 area and S2 - EU Machinery Directive - EU Low voltage dir. - EU EMI/ESD - Carrier ID Reader per I300I Factory guideline | - Seismic Stability for UBC Zone 4 area and S2 - EU Machinery Directive - EU Low voltage dir. - EU EMI/ESD - Carrier ID Reader per I300I Factory guideline |
| RELIABILITY PER SEMI E10 | ||
| MCBF (Cycles) | > 1M | > 1M |
