- BOLTS interface compliance
- Outstanding performance based on pneumatically controlled mechanisms
- Built-in SEMI E84 interface
- Barcode, IR and RF carrier ID reader options
- Minimal particle, vibration and noise generation
Nidec Genmark’s Porta 300™ plus is an advanced load port for 300mm wafer carriers. Uniquely designed, yet in accordance to all applicable SEMI standards and I300I guidelines, the Porta 300™ plus sets a new benchmark in cleanliness, reliability, performance and functionality for the equipment in this category. The state-of-the art wafer mapping delivers 100% accuracy. All major motions are pneumatic controlled, providing fast and precise carrier loading.
The operation of the opener is controlled by full set of safety interlocks protecting both the operator and the equipment. A dedicated set of through-beam sensors avoids collision with robotic arm or wafer. The E84 connector is a standard feature along with the visual indicators – provided in compliance with the latest revision of the E87 standard. The software support, integrated in GB Toolbox, provides simple yet comprehensive diagnostic features and a user-friendly operator interface.
- 8 configurable label and light signals (SEMI E87 compliant)
- 150/200/300mm open cassettes adapter available
- Two manual access buttons (optional)
- Kinematic coupling for accurate mounting
- Fingerprint resistant finish
| Configuration | |
|---|---|
| Compatibility | BOLTS compatible |
| Carrier Types | - FOUP, 25 wafers - FOSB, 25 wafers - 25 wafers 150mm and 200mm cassettes when using open cassette adapter |
| Substrate Size | 150mm, 200mm, 300mm |
| Substrate Type | Wafer |
| Status Indicators | Eight lights, custom configurable |
| Operator Push Buttons | Two - load and unload (can be custom configured) |
| Substrate Mapping | Through-beam |
| Carrier Sensors | Present, placed |
| Carrier ID reader/writer | IR, RF, Barcode |
| Physical Properties | |
| Clamping Mechnism | - Pneumatically actuated keys opening the FOUP door - Pneumatically actuated FOUP lock |
| Height | 1410mm (55.51 inches) With cart 1340mm (52.76 inches) Without cart |
| Width | 476mm (18.74 inches) |
| Actuation | All major axes are pneumatically actuated and controlled |
| Performance | |
| Reliability (Per SEMI E10) | - MTBF > 150,000 HR - MCBF > 25 M CYCLES - Availability 99.9% |
| Speed | Load time without map: < 10 seconds Load time with map: < 10 seconds Unload time: < 10 seconds |
| Environment | |
| Cleanliness | Class 1 ANSI, when in class 100 environment |
| Standards Compliance | |
| SEMI | -E15.1: Load Port -E1.9: Mechanical Specification for Cassettes Used to Transport and Store 300mm Wafers -E10: Equipment Reliability, Availability and Maintainability (RAM) -E47.1: FOUP -E57: Kinematic Coupling -E63: BOLTS-M -E64: Cart Docking Interface -E72: Equipment Footprint, Height and Weight -E83: PVG Docking Flange -E84: Carrier Handoff and Parallel I/O -E110: Indicator / Switch Placement -M31: FOSB -S2: Safety Guidelines for Semiconductor Manufacturing Equipment -S8: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| Other Standards | - Seismic Stability for UBC Zone 4 area and S2 - EU Machinery Directive - EU Low voltage dir. - EU EMI/ESD - Carrier ID Reader per I300I Factory guideline |
