- Works with flat panel handling robots
- Provides accurate remote measurement and misalignment compensation
Nidec Genmark’s Flat Panel Prealigner, a remote measurement unit comprised of three CCDs (Charge Coupled Devices), is designed to work with flat panel handling robots in order to determine the position and orientation of a flat panel. The last moves of the flat panel inside the CCD area and the misalignment of the flat panel are immediately calculated based on the CCD readings. The compensation of the misalignment can be accomplished during the transportation of the object to the target cassette or process station.
| Configuration | |
|---|---|
| Substrate Type | FPD, flat panel |
| Substrate Size | -Min. panel size : 125 mm x 125mm -Max. panel size : not restricted |
| Alignment Accuracy | |
| Center Offset | 0.0015" |
| Angular Offset | 0.1 degrees |
| Alignment Time | 3 sec |
| Initial Offset Allowance | 0.5" |
| Servo Lighthouse Gap | 0.35", 0.5" |
| Maximum Vertical Velocity | 20"/s |
| Maximum Vertical Acceleration | 40"/s2 |
| Physical Properties | |
| Vertical Travel Body Height | 8.5" - 14" 13"- 18.5" 16" – 25.35" |
| Length | 12.8" |
| Width | 4.4” |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance | EN 60204- 1:1997 EN ISO 12100- 2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 / MCBF | >20M |
| Configuration | G-Rex 3 v.1 | G-Rex 3 v.2 |
|---|---|---|
| Substrate Size | up to 450mm | up to 450mm |
| Arm Configurations | 2 Link: 5.25"-5.25; 2 Link: 7-25"-7.25"; 3 Link: 4"-8"-4" | 5.205"-5.205" |
| End Effector | Vacuum, Edge-Gripping, Gravity | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | Reflective; through-beam | Through-beam at the back side of the EE |
| Physical Properties | ||
| Size (Diameter/Length) | 9.76" (body DIA) and 30.25" | 9.8"/20.94" |
| Vert. stroke - body height | 7" - 13.6" 12" - 18.6" 17" - 23.6" 20" - 26.6" | NA (Grey) |
| Axes | 3 - T, R, Z | 3 - T, R, Z |
| Range of Motion | T: 500° R: - 5.25'-5.25': [-10.41 - 10.41] - 7.25'-7.25': [-14.5", 14.5"] - 4"-8"-4": [-16", 16"] Z: 7"; 12"; 17"; 20" | T: 500° R: [-10.41 - 10.41] Z: [10.7"] |
| Performance | ||
| Payload (Dynamic/Static) | 2 lbs | 2 lbs |
| Repeatability | T: +/- 0.01° R: +/- 0.001" Z: +/- 0/001" | T: +/- 0.01° R: +/- 0.001" Z: +/- 0/001" |
| Environment | ||
| Cleanliness | ISO Class 1 Compatible | ISO Class 1 Compatible |
| Wafer Contact Material | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards compliance | ||
| Applicable Directives/Standards | Machine Directive 89/392/EEC 89/336/EEC (EMC) S2-93A S8-95 | Machine Directive 89/392/EEC 89/336/EEC (EMC) S2-93A S8-95 |
| Standards to Verify Compliance | EN 55011 EN 50082-1 EN 60204-1 | EN 55011 EN 50082-1 EN 60204-1 |
| Reliability per SEMI E10 | >15M MCBF | >15M MCBF |
