AVR Vacuum Robot System
The AVR Vacuum Robot family provides highly precise and reliable material handling in ultra-clean, high-vacuum processing environments.
Products
Vacuum Robots
Nidec Genmark's vacuum robots are high-payload capable and feature our patented GPR ™ technology, for precise and reliable transportation of substrates and flat panel displays (FPDs).
AVR SMV 3000 Vacuum Robot System
The AVR SMV 3000 is a high-performance dual-arm vacuum robot that provides precise, reliable and repeatable wafer transportation in vacuum processing capital equipment down to 10E-10 Torr.
GPR GB9 Vacuum Robot System
The GPR GB9 Vacuum Robot System is a part of Nidec Genmark’s GPR™ line of precision transport robotics and is available with vertical stroke options of 3" and 6".
GPR SMV Vacuum Robot System
The GPR SMV Vacuum Robot System is a high-performance dual-arm vacuum robot employing Nidec Genmark's breakthrough patented GPR™ technology.
GPR™ Vacuum Elevator
The GPR™ Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment.
Vacuum Elevator
The Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment, where material handling is performed by robots with limited vertical motion capabilities.
