- Reliable transportation in ultra-clean, high-vacuum processing environments
- Advanced motion coordination for smooth and effective material transfer
- Heavy payload (12lbs), FPD transport ready
- Radial cassette / process chamber access capabilities
The AVR SMV 3000 is a high-performance dual-arm vacuum robot that provides precise, reliable and repeatable wafer transportation in vacuum processing capital equipment down to 10E-10 Torr.
The latest technology incorporated into the arm and transmission design guarantees zero backslash in the case of a collision with an occasionally overactive gate valve. This translates into immediate recovery without having to re-teach the robot. The mechanics of this robot contribute to its simplicity, modular design, easy control, teaching and programming.
Advanced motion planning in continuous smooth trajectories guarantees superior performance and effective implementation in various back-end layouts.
The AVR SMV 3000 is available with various end effector options, allowing the robot to transport a wide array of FPDs, wafers and photo-masks.
- Ultra High Vacuum compatible (up to 10E-10 Torr)
- Less than class 1 clean room compatible
- DSP-based motion control for fast, vibration free material transport
- Faster wafer swapping minimizes process module idle time
- Smallest footprint for its reach provides the most efficient usage of available space around the robotic system
| Configuration | |
|---|---|
| Substrate Size | Wafers up to 300mm |
| Arm Configurations | 2 Link 7.5"-7.5" |
| End Effector | Gravity |
| Physical Properties | |
| Size (body diameter) | 11.5" |
| Body Height | 20.46" |
| Axes | 4: T, R, R2, Z. |
| Range of Motion | T: 360° R and R2: -7.25"-7.25": [-13.775", 13.775"] Z: 1.5" |
| Performance | |
| Payload | 12 lbs |
| Base Operating Pressure | 10E-10 Torr |
| Leak Rate | <1*10E-9 std cc/sec |
| Repeatability | T: +/- 0.01° R: +/- 0.001" R2: +/- 0.001" Z: +/- 0.001" |
| Radial ( R ) | 0.001" |
| Rotational ( T ) | 0.01° |
| Vertical ( Z ) | 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer Contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance | EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability per SEMI E10 | >14M MCBF |
