- Reliable transportation in ultra-clean, high-vacuum processing environments
- Advanced motion coordination for smooth and effective material transfer
- Heavy payload, FPD transport ready
The AVR Vacuum Robot family provides highly precise and reliable material handling in ultra-clean, high-vacuum processing environments.
Its specialized kinematics, actuation and motion-transmission design ensure fast arm motion, high accuracy and robustness against excessive external forces applied to the links. Advanced motion coordination across multi-segment trajectories with overlapping velocity profiles guarantees smooth and efficient material transfer.
The AVR offers up to 6 inches of vertical travel, multiple arm lengths up to 25 inches and a variety of end effector options. These configurations allow the robot to handle a wide range of substrates —including wafers up to 300 mm, rectangular panels and photomasks —over an extended radial reach and make it the handler of choice for various semiconductor processing applications.
- Ultra High Vacuum compatible (to 10E-10 Torr)
- Less than class 1 clean room compatible
- DSP-based motion control for fast, vibration free material transport
| Configuration | |
|---|---|
| Substrate Size | up to 300mm |
| Substrate Type | Wafers, rectangular substrates, reticles, platters |
| Arm Configurations | 2 link: 5.25”-5.25”; 7.5”-7.5”; 10.5”-10.5”; 12.5”-12.5” |
| End Effector | Gravity |
| Physical Properties | |
| Size (body diameter) | 9.83" |
| Body Height | 18" |
| Axes | 3: T, R, Z |
| Range of Motion | T: 500° R: ±10.5"; ±15"; ±20"; ±24"; Z: up to 6" |
| Performance | |
| Payload | 5 lbs |
| Base Operating Pressure | 10E-10 Torr |
| Leak Rate | <1*10E-9 std cc/sec |
| Repeatability | T: ±0.01° R: ±0.001" Z: ±0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer Contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance | EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability per SEMI E10 | >16M MCBF |
