- Precise, high-resolution wafer indexing
- HV-compatible – up to 10-8 torr
- Cost-effective, seamless integration with Nidec Genmark's vacuum robots
The GPR™ Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment. The GPR™ Vacuum Elevators feature Nidec Genmark Automation’s breakthrough GPR™ technology, allowing a tilt of up to 1.5 degrees of the lifting platform. The GPR™ Vacuum Elevator provides vertical indexing with 16” [406 mm] travel, and it is capable to lift a load of up to 50 lb. The elevator translational mechanism is isolated from the atmospheric environment by using Ferro fluidic and magnetically-coupled seals.
The patented GPR technology enables the servo-controlled mechanisms to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
- Patented GPR ™ technology
- Heavy-payload - capable of lifting loads up to 50 lbs
| Configuration | |
|---|---|
| Substrate Carrier Type | Wafer cassettes and boats |
| Physical Properties | |
| Size (body diameter) | 14.13" |
| Vertical Stroke / Body Height | 14.9" / 23.1" 16" / 25" |
| Axes | 3: Z, Z1, Z2 |
| Range of Motion | Z: 14.9", 16" |
| Performance | |
| Payload | 50 lbs |
| Base Operating Pressure | 10E-8 Torr |
| Leak Rate | <1*10E-9 std cc/sec |
| REPEATABILITY | |
| Vertical ( Z ) | 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer Contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance | EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability per SEMI E10 | >14M MCBF |
