- Precise, high-resolution wafer indexing
- Cost-effective, seamless integration with Nidec Genmark's vacuum robots
- Single or double axis
Nidec Genmark’s vacuum elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment, where the material handling is performed by robots with limited vertical motion capabilities.
The vacuum elevator may have one or two servo-controlled axes. The single-axis elevator provides vertical indexing with 7, 14, 17 inches travel. The double-axis elevator has additional 360 degrees rotation around the vertical axis. Both translational and rotational mechanisms are isolated from the atmospheric environment by using Ferro-fluidic and magnetically-coupled seals.
- HV-compatible – up to 10-8 torr
- 20 lbs. payload capability
- Options for easy integration, variety of travel ranges, vertical rotation
- DSP-based motion control for vibration-free wafer transport
| Configuration | |
|---|---|
| Substrate Carrier Type | Wafer cassettes and boats |
| Physical Properties | |
| Size (body diameter) | Single axis: 10.35" Double axis: 12.50" |
| Vertical Stroke / Body Height | 7" / 15.6" 14" / 22.6" 17" / 25.6" |
| Axes | Single: Z Double: Z, T |
| Range of Motion | Z: 7", 14", 17" T : 360 degrees |
| Performance | |
| Payload | 20 lbs |
| Base Operating Pressure | 10E-8 Torr |
| Leak Rate | <1*10E-9 std cc/sec |
| REPEATABILITY | |
| Rotational (T) | T: +/- 0.01 degree |
| Vertical ( Z ) | Z: +/- 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer Contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards | Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance | EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability per SEMI E10 | >14M MCBF |
